Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber
作者： Steven Verhaverbeke , Eugene Smargiassi , Brian H. Burrows , Ho-Man Rodney Chiu
DOI:
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摘要: A single wafer cleaning chamber that includes a rotatable bracket can place beneath an upper end of catch cup during process, gutter positioned above transfer slit; where the mate with to create gap, and at height equal or higher than gutter.
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