Spin head and substrate treating method using the same
作者： Hyun Jong Kim , Jung Keun Cho , Ju Won Kim
DOI:
关键词:
摘要: A spin head includes a rotatable plate, first chucking pins and second for supporting edge portion of substrate loaded on the driving unit selectively pins. The magnet connected to pin disposed at height, magnets. is elevated by means an elevating member apply magnetic force or moves in radius outside direction due force.
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