Electromechanical properties of sol-gel derived Ca-modified PbTiO3 films

作者: A. Kholkin , A. Seifert , N. Setter

DOI: 10.1063/1.121608

关键词: Sol-gelAnnealing (metallurgy)PiezoelectricityPorosityDielectricPermittivityCrystallizationComposite materialElectrostriction

摘要: Piezoelectric coefficients and electric field-induced strains are investigated in Ca-modified PbTiO3 (PCT) films deposited by sol-gel technique. The microstructural evolution related electromechanical properties studied as a function of Ca content porosity the films. is tailored changing heating rate during final crystallization anneal. It found that piezoelectric porous heated at slow rates superior to those dense crystallized using higher rates. This explained result constraining effect substrate, which apparently reduces strain responses Electromechanical also improved with addition due decrease tetragonality ease 90 degrees domain rotation. Charge close PCT ceramics same composition. These results, combined low dielectric constant, make an attractive material for microelectromechanical applications. (C) 1998 American Institute Physics. [S0003-6951(98)01825-7].

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