Piezoelectric resonator structure
作者： Hao Zhang
DOI:
关键词: Piezoelectric coefficient 、 Materials science 、 Resonator 、 Ceramic resonator 、 PMUT 、 Electrode 、 Dielectric resonator antenna 、 Optoelectronics 、 Helical resonator 、 Layer (electronics)
摘要: A piezoelectric resonator structure, comprising: (i) a substrate, (ii) an acoustic mirror, (iii) first electrode, (iv) layer, and (v) second wherein each of the electrode has top surface bottom surface, end portion opposite, portion, body defined therebetween, overlapped area portions layer is as active A. plurality air gaps interference structures formed at to enhance performance resonator.
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