Influence of interfacial properties on thermal transport at gold:silicon contacts

作者: J. C. Duda , C.-Y. P. Yang , B. M. Foley , R. Cheaito , D. L. Medlin

DOI: 10.1063/1.4793431

关键词: ConductanceNanotechnologyInterfacial thermal resistanceComposite materialElectrical contactsSiliconMaterials scienceLayer (electronics)Deposition (law)AdhesionOxide

摘要: We measure the Kapitza conductances at Au:Si contacts from 100 to 296 K via time-domain thermoreflectance. Contacts are fabricated by evaporating Au films onto Si substrates. Prior deposition, substrates receive pretreatments in order modify interfacial properties, i.e., bonding and structural disorder. Through inclusion of a Ti adhesion layer removal native oxide, conductance can be enhanced factor four 296 K. Furthermore, roughness is found have negligible effect, which we attribute already low poorly bonded contacts.

参考文章(39)
D. P. Sellan, E. S. Landry, J. E. Turney, A. J. H. McGaughey, C. H. Amon, Size effects in molecular dynamics thermal conductivity predictions Physical Review B. ,vol. 81, pp. 214305- ,(2010) , 10.1103/PHYSREVB.81.214305
E. T. Swartz, R. O. Pohl, Thermal boundary resistance Reviews of Modern Physics. ,vol. 61, pp. 605- 668 ,(1989) , 10.1103/REVMODPHYS.61.605
Brian M. Foley, Harlan J. Brown-Shaklee, John C. Duda, Ramez Cheaito, Brady J. Gibbons, Doug Medlin, Jon F. Ihlefeld, Patrick E. Hopkins, Thermal conductivity of nano-grained SrTiO3 thin films Applied Physics Letters. ,vol. 101, pp. 231908- ,(2012) , 10.1063/1.4769448
Yee Kan Koh, Yu Cao, David G. Cahill, Debdeep Jena, Heat-Transport Mechanisms in Superlattices Advanced Functional Materials. ,vol. 19, pp. 610- 615 ,(2009) , 10.1002/ADFM.200800984
Dong-Wook Oh, Seok Kim, John A. Rogers, David G. Cahill, Sanjiv Sinha, Interfacial thermal conductance of transfer-printed metal films. Advanced Materials. ,vol. 23, pp. 5028- 5033 ,(2011) , 10.1002/ADMA.201102994
John C. Duda, Timothy S. English, Edward S. Piekos, Thomas E. Beechem, Thomas W. Kenny, Patrick E. Hopkins, Bidirectionally tuning Kapitza conductance through the inclusion of substitutional impurities Journal of Applied Physics. ,vol. 112, pp. 073519- ,(2012) , 10.1063/1.4757941
Cho Yen Ho, Thermal Conductivity of the Elements Journal of Physical and Chemical Reference Data. ,vol. 1, pp. 279- 421 ,(1972) , 10.1063/1.3253100
Ming Hu, Pawel Keblinski, Patrick K. Schelling, Kapitza conductance of silicon–amorphous polyethylene interfaces by molecular dynamics simulations Physical Review B. ,vol. 79, pp. 104305- ,(2009) , 10.1103/PHYSREVB.79.104305
Patrick E. Hopkins, Mira Baraket, Edward V. Barnat, Thomas E. Beechem, Sean P. Kearney, John C. Duda, Jeremy T. Robinson, Scott G. Walton, Manipulating thermal conductance at metal-graphene contacts via chemical functionalization. Nano Letters. ,vol. 12, pp. 590- 595 ,(2012) , 10.1021/NL203060J
Lin Hu, Lifa Zhang, Ming Hu, Jian-Sheng Wang, Baowen Li, Pawel Keblinski, Phonon interference at self-assembled monolayer interfaces: Molecular dynamics simulations Physical Review B. ,vol. 81, pp. 235427- ,(2010) , 10.1103/PHYSREVB.81.235427