Catalyst-Free Growth of High-Quality ZnO Nanorods on Si(100) Substrate by Two-Step, Off-Axis Pulsed-Laser Deposition
作者： Ryo Nishimura , Tatsunori Sakano , Takeshi Okato , Toshiharu Saiki , Minoru Obara
DOI: 10.1143/JJAP.47.4799
关键词: Zinc 、 Pulsed laser deposition 、 Two step 、 Nanorod 、 Chemical engineering 、 Materials science 、 Cathode 、 Luminescence 、 Annealing (metallurgy) 、 Catalysis 、 Nanotechnology
摘要: We demonstrate the growth of ZnO nanorods on a Si(100) substrate through two-step process, annealing and off-axis pulsed laser deposition (PLD), without catalyst. powder was first dispersed Si substrate, annealed to form seeds for nanorod 2.5 h. In second step, deposited by PLD 1 It experimentally confirmed that surface morphology after acts as nuclei nanorods. Controlling parameters during enables adjustment sizes nanorods, namely, diameter length. The diameters grown are 50–700 nm lengths 2–10 µm. Cathode luminescence (CL) spectra were used evaluate states defects within According CL measurement results, thinnest arrays found have fewer defects, more introduced became thicker.
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