Recent Research and Emerging Challenges in Physical Design for Manufacturability/Reliability
作者： Chung-Wei Lin , Ming-Chao Tsai , Kuang-Yao Lee , Tai-Chen Chen , Ting-Chi Wang
DOI: 10.1109/ASPDAC.2007.357992
关键词: Manufacturing engineering 、 Manufacturing process 、 Physical design 、 Key (cryptography) 、 Design for manufacturability 、 Process (engineering) 、 Systems engineering 、 Engineering 、 Reliability (statistics) 、 Scale down
摘要: … antee yield and reliability, physical design for manufacturability and reliability has played a pivotal role in resolution and thus yield … in physical design for manufacturability and reliability. …
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ntu.edu.tw 参考文章(42)
Alfred Kwok-Kit Wong, Resolution enhancement techniques in optical lithography ,(2001)
E. S. Snyder, D. G. Pierce, S. E. Swanson, D. V. Campbell, Self-stressing test structures used for high-frequency electromigration international conference on microelectronic test structures. pp. 22- 24 ,(1994)
J R Lloyd, Electromigration in integrated circuit conductors Journal of Physics D. ,vol. 32, ,(1999) , 10.1088/0022-3727/32/17/201
Liang Deng, Martin D. F. Wong, Kai-Yuan Chao, Hua Xiang, Coupling-aware Dummy Metal Insertion for Lithography asia and south pacific design automation conference. pp. 13- 18 ,(2007) , 10.1109/ASPDAC.2007.357785
David M. Pawlowski, Liang Deng, Martin D. F. Wong, Fast and Accurate OPC for Standard-Cell Layouts asia and south pacific design automation conference. pp. 7- 12 ,(2007) , 10.1109/ASPDAC.2007.357784
Andrew B. Kahng, Research directions for coevolution of rules and routers Proceedings of the 2003 international symposium on Physical design - ISPD '03. pp. 122- 125 ,(2003) , 10.1145/640000.640028
Minsik Cho, David Z. Pan, Hua Xiang, Ruchir Puri, Wire density driven global routing for CMP variation and timing international conference on computer aided design. pp. 487- 492 ,(2006) , 10.1145/1233501.1233599
Puneet Gupta, Andrew B. Kahng, Chul-Hong Park, Detailed placement for improved depth of focus and CD control Proceedings of the 2005 conference on Asia South Pacific design automation - ASP-DAC '05. ,vol. 1, pp. 343- 348 ,(2005) , 10.1145/1120725.1120866
Levi D. Barnes, Benjamin D. Painter, Lawrence S. Melvin III, Model-based placement and optimization of subresolution assist features Proceedings of SPIE, the International Society for Optical Engineering. ,vol. 6154, pp. 789- 795 ,(2006) , 10.1117/12.656691
I-Min Liu, D.F. Wong, Li-Da Huang, Xiaoping Tang, Hua Xiang, A Polynomial Time Optimal Diode Insertion/Routing Algorithm for Fixing Antenna Problem design, automation, and test in europe. pp. 470- 475 ,(2002) , 10.5555/882452.874435