Preparation of ultrafine tungsten carbide powder by CVD method from WCl 6 -C 2 H 2 - H 2 mixtures

作者: Chang-Whan Won , Byong-Sun Chun , H.Y. Sohn

DOI: 10.1557/JMR.1993.2702

关键词: Product (mathematics)Chemical engineeringReaction conditionsSpecific surface areaTungsten carbideParticle sizeMaterials scienceMineralogyVolumetric flow rateMorphology (linguistics)Partial pressure

摘要: The synthesis of ultrafine tungsten carbide powder from WCl6–C2H2-H2 mixtures was investigated. Under most experimental conditions, a mixture α–WC and β–W2C produced. specific surface area morphology the product prepared under various reaction conditions were determined. particle size increased with temperature up to 1373 K then decreased, went through minimum increasing WCl6 partial pressure, decreased H2 flow rate. showed opposite trend in all cases.

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