Photocatalyst element, method and device for preparing the same
作者： Hisato Haraga , Yoshio Kawamata , Takahiro Doke , Daisuke Noguchi , Junji Hiraoka
DOI:
关键词: Titanium oxide 、 Photocatalysis 、 Optics 、 Titanium 、 Materials science 、 Sputtering 、 Substrate (electronics) 、 Chemical engineering 、 Anatase 、 Hydrophilization 、 Partial pressure
摘要: A photocatalyst according to the invention comprises a photocatalytic film of compound titanium and oxygen is characterized in that made porous has 0.02 or higher value as calculated by dividing arithmetical mean deviation profile Ra with thickness. The can also be specified intensity ratio between x-ray diffraction peaks anatase structure oxide. Such material obtained reactive sputtering method conditions adjusting formation parameters such rate, pressure, substrate temperature, partial pressure like proper ranges, respectively, provided excellent decomposition hydrophilization capability.
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