Method for manufacturing a flat panel display using localized wet etching
作者： James Alwan
DOI:
关键词: Field electron emission 、 Flat panel display 、 Optoelectronics 、 Dry etching 、 Etching (microfabrication) 、 Structural engineering 、 Materials science
摘要: A method is provided for locally etching certain structures formed in outer peripheral areas of field emission devices. The include alignment marks and bond pads, which require removal materials deposited on the during manufacture.
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