Deformable mirror light modulator

摘要: A light modulator comprising a light-reflective metallized membrane defining deformable mirror disposed over semiconductor substrate of one conductivity type in which matrix array field effect address transistors are formed, the cooperating with floating metallic plate members on an insulating layer covering to define air gap capacitors for line addressing by transistors. The plates opaque and prevent photocharge generation active regions is spaced from upstanding grid structure formed defines gate electrodes mounted molecular bonding contact structure. polymer nitrocellulose as flexible carrier at least surface thin coating providing reflective surface. Each transistor line-addressable, each cell deflectable inwardly toward response signal corresponding thereto. Should potential above predetermined magnitude be placed individual capacitor, will transfer charge return zero deflection. thereby not only acts light-blocking layer, but also prevents voltage-induced collapse substrate.