Zero temperature coefficient characteristic of four-corner-truncated square quartz resonator supported at four nodal points in Lamé mode

摘要: This paper describes analytical and experimental study of a zero-temperature-coefficient square Lame-mode quartz resonator supported at four nodal points. Comparison vibration mode shapes the resonators with without supporting beams in modal analysis using finite element indicated that several contour modes vibrating large amplitude corners frequency lower than Lame get boost by constraint resulted spurious to temperature shift. these unwanted truncation plate another caused reduction mass where vibrates amplitude. Four-corner truncated were designed fabricated wet etching process. Measured data made LQ 1 T 2 cut plates zero coefficient electrical equivalent circuit parameters comparable those fundamental two point support.