Design and Optimization of a Multichannel Quartz Crystal Microbalance Sensor Array for Multiple Target Gas Detection

摘要: Quartz Crystal Microbalance is a candidate technology for high sensitivity gas detection that operates based on the thickness shear mode of piezoelectric crystal. These sensors can detect nanogram level mass change their electrode surface, which leads to accuracy while benefiting from simple geometry, low cost and ease fabrication. Unlike conventional are limited single-electrode structure hampering capability, in this work novel 5MHz multielectrode sensor designed optimized single substrate. This developed be used simultaneously present multiple gases complex environment. Therefore, new design configuration eliminates need reduces complexity fabrication measurements. In order enhance proposed device’s performance, analytical modeling finite element analysis further conducted optimize device highsensitivity applications. A four-electrode substrate with electrodes’ thickness, radius, center distance 300nm, 500μm, 6.5mm respectively. The achieved 0.135 Hz.cm2.ng-1 eliminating interference between electrodes.