Monolithic fabrication of wireless miniaturized quartz crystal microbalance (QCM-R) array for biochemical sensing
作者： J. Rabe , V. Seidemann , S. Buettgenbach
DOI: 10.1109/SENSOR.2003.1217155
关键词:
摘要: We report on a novel wireless quartz crystal microbalance sensor array with integrated micro coils for remote readout (QCM-R). It consists of miniaturized microbalances solely fabricated by microfabrication batch processes including wet chemical thinning membranes, electroplating through lithographic masks and via interconnections the substrate. Measurements varying distance between QCM-R coil showed resonant frequency independence coupling. Recent experiments immobilized Protein A adsorption its antibody proved excellent performance system.
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