Nanowires piezoelectric constants determination using current-voltage measurements
作者： Mahmoud Al Ahmad , Nedal Al Taradeh , Irfan Saadat
DOI: 10.1109/ISAF.2015.7172720
关键词: Piezoelectric sensor 、 PMUT 、 Electrical engineering 、 Optoelectronics 、 Piezoelectric coefficient 、 Piezoelectricity 、 Materials science 、 Nanowire 、 Field-effect transistor 、 Electromechanical coupling coefficient 、 Nanogenerator
摘要: This work demonstrates an original method using the electromechanical properties of zinc oxide (ZnO) piezoelectric nanowires to characterize its voltage coefficient (d 33 ). The proposed technique utilizes current-voltage (IV) measurements coupled with application variable force cause a change in corresponding IV relationship. To conduct measurements, nanowire is integrated inside field effect transistor (FET) form channel device, while it suspended over trench. indentation nano-wire causes mechanical deflection which through changes characteristics FET. extraction done by modifying standard FET model incorporate length triggered behavior. Embedded within this and therefore, becomes straightforward procedure extract from characteristics.
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