Nucleation and growth of Si nanowires from silicon oxide

作者: N. Wang , Y. H. Tang , Y. F. Zhang , C. S. Lee , S. T. Lee

DOI: 10.1103/PHYSREVB.58.R16024

关键词: NanotechnologyCrystalliteNanowireSubstrate (electronics)Transmission electron microscopyNucleationChemical engineeringOxideSilicon oxideMaterials scienceLaser ablation

摘要: … According to the mechanism discussed above, nucleation and … particle chain supports this growth mechanism. As shown in Fig. 3b… In summary, TEM study of Si nanowire nucleation and …

参考文章(13)
R. S. Wagner, W. C. Ellis, VAPOR‐LIQUID‐SOLID MECHANISM OF SINGLE CRYSTAL GROWTH Applied Physics Letters. ,vol. 4, pp. 89- 90 ,(1964) , 10.1063/1.1753975
E.I. Givargizov, Fundamental aspects of VLS growth Journal of Crystal Growth. ,vol. 31, pp. 20- 30 ,(1975) , 10.1016/0022-0248(75)90105-0
Harvey I Liu, Nadim I Maluf, RFW Pease, David K Biegelsen, Noble M Johnson, Fernando A Ponce, Oxidation of sub-50 nm Si columns for light emission study Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 10, pp. 2846- 2850 ,(1992) , 10.1116/1.585971
Hideo Namatsu, Fabrication of one-dimensional nanowire structures utilizing crystallographic orientation in silicon and their conductance characteristics Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 15, pp. 1688- 1696 ,(1997) , 10.1116/1.589356
Yasuo Wada, Polycrystalline silicon ‘‘slit nanowire’’ for possible quantum devices Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 12, pp. 48- 53 ,(1994) , 10.1116/1.587104
Takahito Ono, Hiroaki Saitoh, Masayoshi Esashi, Si nanowire growth with ultrahigh vacuum scanning tunneling microscopy Applied Physics Letters. ,vol. 70, pp. 1852- 1854 ,(1997) , 10.1063/1.118711
R. Hasunuma, Formation of Si nanowire by atomic manipulation with a high temperature scanning tunneling microscope Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 15, pp. 1437- 1441 ,(1997) , 10.1116/1.589468
Alfredo M. Morales, Charles M. Lieber, A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires Science. ,vol. 279, pp. 208- 211 ,(1998) , 10.1126/SCIENCE.279.5348.208
N Wang, YH Tang, YF Zhang, DP Yu, CS Lee, I Bello, ST Lee, None, Transmission electron microscopy evidence of the defect structure in Si nanowires synthesized by laser ablation Chemical Physics Letters. ,vol. 283, pp. 368- 372 ,(1998) , 10.1016/S0009-2614(97)01378-X
YF Zhang, YH Tang, N Wang, DP Yu, CS Lee, I Bello, ST Lee, None, Silicon nanowires prepared by laser ablation at high temperature Applied Physics Letters. ,vol. 72, pp. 1835- 1837 ,(1998) , 10.1063/1.121199