Structural, electrical, and optical characteristics of lithium-implanted ZnO thin films

作者: S. Nagar , S.K. Gupta , S. Chakrabarti

DOI: 10.1016/J.SPMI.2012.10.008

关键词: PhotoluminescenceX-ray crystallographyThin filmScanning electron microscopeMaterials scienceExcitonAnnealing (metallurgy)IonAnalytical chemistryPulsed laser deposition

摘要: Abstract Lithium ions were implanted at low energies (40 and 50 keV) a dosage of 5 × 1013 ions/cm2 over 〈0 0 2〉 ZnO thin films that had been deposited by pulsed laser deposition. The samples subsequently treated rapid thermal annealing 750 °C. Scanning electron microscopy images revealed improved grain formation for the samples. However, presence microvoids was also observed in these samples; amount tended to increase on high-temperature annealing. Dominant donor-bound-exciton peaks is all along with some defect related exciton bound although lesser intensity compared as-deposited sample.

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