Silver catalysis in the fabrication of silicon nanowire arrays

作者: Hui Fang , Yin Wu , Jiahao Zhao , Jing Zhu , None

DOI: 10.1088/0957-4484/17/15/026

关键词: SiliconNetwork structureCatalysisEtching (microfabrication)NanotechnologyFabricationIsotropic etchingComposite numberSilicon nanowiresMaterials science

摘要: … According to our previous results, it seems that all the Ag nanoclusters sink perpendicular to the substrate surface. However, in some cases we found that the Ag nanoclusters do not …

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