Dielectric-layer-coated substrate and installation for production thereof
作者： Eric Mattman , Jean Paul Rousseau , Alfred Hofrichter , Klaus Fischer , Marcus Loergen
DOI:
关键词: Ion beam 、 Magnetic field 、 Analytical chemistry 、 Refractive index 、 Dielectric layer 、 Oxygen 、 Ion source 、 Nitrogen 、 Substrate (electronics) 、 Composite material 、 Materials science
摘要: The invention relates to a substrate (1), such as glass substrate, which is coated with at least one thin dielectric layer. According the invention, layer deposited by means of cathode sputtering is, for example, assisted magnetic field and preferably reactive in presence oxygen and/or nitrogen, exposure ion beam (3) from an source (4). characterised that exposed has refractive index can be adjusted on basis parameters source, said being linear source.
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