Surface observation apparatus and surface observation method
作者： Naoma Ban , Takehiro Hirai , Kenji Obara
DOI:
关键词: Artificial intelligence 、 Image processing 、 Correlation coefficient 、 Value (computer science) 、 Surface (mathematics) 、 Observation method 、 Mathematics 、 Image (mathematics) 、 Absolute value (algebra) 、 Computer vision
摘要: A surface observation apparatus is achieved, which enables even a beginner to easily select an optimal evaluation indicator for each of various patterns be evaluated without trial and error approach. plurality images are input from image processing unit ( 114 ) 113 (in step 901 ). The displayed on display 115 user rearranges the in accordance with criterion while referencing ), defines 902 Evaluation values calculated (to evaluated) using indicators 903 compared defined by user, correlation coefficients then 904 An having maximum absolute value coefficient automatically selected as that closest 905 rearranged order list so arranged 906
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