作者: Tak Hung Ning , Brian Ji , Jin Cai
DOI:
关键词: Silicon on insulator 、 Silicon 、 Electrode 、 Optoelectronics 、 CMOS 、 Layer (electronics) 、 Gate dielectric 、 Materials science 、 Gate oxide 、 Substrate (electronics) 、 Electrical engineering
摘要: A CMOS device includes a silicon substrate and an electrical insulator formed over the substrate. The also access pFET first gate stack storage insulator, including second source region that is co-formed with drain region, channel region. dielectric layer above floating electrode layer.