Driver laser for extreme ultraviolet light source apparatus and lpp-type extreme ultraviolet light source apparatus
作者： Takashi Suganuma , Tatsuya Ariga , Akira Endo , 達也 有我 , 崇 菅沼
DOI:
关键词: Laser 、 Extreme ultraviolet 、 Oscillation 、 Optoelectronics 、 Beam parameter product 、 Extreme ultraviolet lithography 、 Laser beam quality 、 Optics 、 Physics 、 Amplifier 、 Laser power scaling
摘要: PROBLEM TO BE SOLVED: To realize a driver laser for EUV light source apparatus which simultaneously achieves pulse shortening and multiline oscillation. SOLUTION: A comprises short-pulse oscillation CO 2 oscillator having means pulses of beam to be output, suppressing an spectrum exhibiting energy peak value; at least one amplifier inputs the with shortened that is output by oscillator, amplifies outputs input beam. COPYRIGHT: (C)2006,JPO&NCIPI
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