Driver laser for extreme ultra violet light source device
作者： Hideo Hoshino , Tatsuya Ariga , Akira Endo , Taisuke Miura
DOI:
关键词:
摘要: A driver laser for an extreme ultra violet light source device capable of suppressing self-oscillation light, amplifying a beam efficiently, and reducing size. The has oscillator generating to output the generated beam, at least one amplifier from amplified beam. includes discharge unit which amplifies by using energy medium excited discharge, feedback mirror leads unit, polarizer into also reflects predetermined direction, filter attenuates unit.
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