Design optimization and implementation of a microgravity capacitive HARPSS accelerometer
作者： P. Monajemi , F. Ayazi
关键词: Noise floor 、 Capacitive sensing 、 Electrical engineering 、 Silicon 、 Acceleration 、 Accelerometer 、 Materials science 、 Acoustics 、 Sensitivity (electronics) 、 Noise (electronics) 、 Sense (electronics)
摘要: This paper reports on the design optimization and implementation of a lateral capacitive accelerometer with high sensitivity micro-g resolution, fabricated through high-aspect ratio polysilicon single-crystal silicon process regular wafers. A new vertical corrugation in electrodes is developed to reduce mechanical noise equivalent acceleration sensor. The predicted effect thermomechanical also static verified using ANSYS steady-state thermal simulation FEMLAB linear stationary electrostatics analysis, respectively. number corrugated sense gap spacing optimized minimize system (sensor + circuit) floor, while satisfying electronics limits. open-loop differential 60-/spl mu/m-thick prototype measured be 0.25 V/g 4.5 pF/g over 1-g range. estimated total 0.95 /spl mu/g//spl radic/Hz atmosphere.
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