Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers
作者： Friedel Gerfers , Peter M Kohlstadt , Eyal Ginsburg , Ming Yuan He , Dean Samara-Rubio
DOI: 10.5772/6887
关键词:
摘要: Over the past two decades, significant advances have been made in the field of micromachined sensors and actuators. As microelectromechanical systems (MEMS) have become …
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