Nano- and micro-electromechanical resonators
作者： Matteo Rinaldi , Zhenyun Qian , Yu Hui
DOI:
关键词:
摘要: A resonator including a piezoelectric plate and an interdigital electrode is provided. ratio between thickness of the pitch may be from about 0.5 to 1.5. radiation detector absorber layer capable absorbing at least one infrared terahertz two-dimensional electrically conductive material
lens.org 参考文章(14)
Moon Chul Lee, Jea Shik Shin, Sang Uk Son, Ho Soo Park, Jing Cui, In Sang Song, Chul Soo Kim, Duck Hwan Kim, Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator ,(2012)
Friedel Gerfers, Peter M Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli, Li-Peng Wang, Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers InTech. ,(2010) , 10.5772/6887
Yu Hui, Zhenyun Qian, Matteo Rinaldi, A 2.8 GHz combined mode of vibration aluminum nitride MEMS resonator with high figure of merit exceeding 45 international frequency control symposium. pp. 930- 932 ,(2013) , 10.1109/EFTF-IFC.2013.6702272
Zhenyun Qian, Yu Hui, Matteo Rinaldi, Fangze Liu, Swastik Kar, Single transistor oscillator based on a Graphene-Aluminum Nitride nano plate resonator international frequency control symposium. pp. 559- 561 ,(2013) , 10.1109/EFTF-IFC.2013.6702274
M. Rinaldi, C. Zuniga, G. Piazza, 5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. pp. 916- 919 ,(2009) , 10.1109/MEMSYS.2009.4805533
Yu Hui, Matteo Rinaldi, Ultra-fast and high resolution NEMS thermal detector based on a nano-air-gap piezoelectric resonant structure ieee sensors. pp. 1- 4 ,(2012) , 10.1109/ICSENS.2012.6411594
Y. Hui, M. Rinaldi, High performance NEMS resonant infrared detector based on an aluminum nitride nano-plate resonator international conference on solid state sensors actuators and microsystems. pp. 968- 971 ,(2013) , 10.1109/TRANSDUCERS.2013.6626930
M.S. Bhuyan, Masuri Othman, Sawal Hamid Md Ali, Burhanuddin Yeop Majlis, Md. Shabiul Islam, Investigation on MEMS-based piezoelectric energy harvester design with aspect of autonomous automobile sensors Asian Journal of Scientific Research. ,vol. 6, pp. 1- 15 ,(2013) , 10.3923/AJSR.2013.1.15
Z. Qian, Y. Hui, F. Liu, S. Kar, M. Rinaldi, 245 MHz graphene-aluminum nitride nano plate resonator 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). pp. 2005- 2008 ,(2013) , 10.1109/TRANSDUCERS.2013.6627190
Chengjie Zuo, Jan Van der Spiegel, Gianluca Piazza, Dual-Mode Resonator and Switchless Reconfigurable Oscillator Based on Piezoelectric AlN MEMS Technology IEEE Transactions on Electron Devices. ,vol. 58, pp. 3599- 3603 ,(2011) , 10.1109/TED.2011.2162413