Design and optimization of high quality factor MEMS piezoelectric resonator with pseudo electrodes
作者： Nidhi Paliwal , Neha Mukhija , Deepak Bhatia
DOI: 10.1109/ICRITO.2015.7359360
关键词: Resonator 、 Microelectromechanical systems 、 Electrode 、 Filter (video) 、 Quality (physics) 、 Piezoelectricity 、 Interference (communication) 、 Optoelectronics 、 Interference (wave propagation) 、 Computer science 、 Multiphysics
摘要: The following work reports design and optimization of a MEMS resonator with some pseudo electrodes. Three, five seven psuedo electrodes are placed simulated. It has been observed that structure gives very high quality factor in addition to minimum false modes interference. Simulation is done on COMSOL multiphysics. Furthermore, influence various piezoelectric materials like AlN, PZT ZnO were studied proving AlN as superb thin film or electroacoustic material, have Quality factor. Appropriate material needed order efficiently for filter RF applications.
sci-hub.se 参考文章(6)
Friedel Gerfers, Peter M Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli, Li-Peng Wang, Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers InTech. ,(2010) , 10.5772/6887
Marc-Alexandre Dubois, Paul Muralt, Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications Applied Physics Letters. ,vol. 74, pp. 3032- 3034 ,(1999) , 10.1063/1.124055
Rich Ruby, A decade of FBAR success and what is needed for another successful decade symposium on piezoelectricity, acoustic waves and device applications. pp. 365- 369 ,(2011) , 10.1109/SPAWDA.2011.6167265
Tarun Kanti Bhattacharyya, Joydeep Basu, Microelectromechanical resonators for radio frequency communication applications Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 17, pp. 1557- 1580 ,(2011) , 10.1007/S00542-011-1332-9
H.M. Liaw, F.S. Hickernell, The characterization of sputtered polycrystalline aluminum nitride on silicon by surface acoustic wave measurements IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 42, pp. 404- 409 ,(1995) , 10.1109/58.384450
G. Piazza, P.J. Stephanou, M.B.J. Wijesundara, A.P. Pisano, Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators international conference on solid state sensors actuators and microsystems. ,vol. 2, pp. 2065- 2068 ,(2005) , 10.1109/SENSOR.2005.1497509