Effect of Annealing Time Process on the pH Sensitivity of Spin-coated TiO2/ ZnO Bilayer Film
作者： R A Rahman , M A Zulkefle , K A Yusof , W F H Abdullah , M Rusop
DOI: 10.1088/1757-899X/99/1/012019
关键词: Titanium dioxide 、 Thin film 、 Indium tin oxide 、 Materials science 、 Spin coating 、 Buffer solution 、 Bilayer 、 Analytical chemistry 、 Zinc 、 Annealing (metallurgy)
摘要: This paper presents an investigation on titanium dioxide (TiO2) and zinc oxide (ZnO) bilayer film, which is used as sensing membrane for extended-gate field effect transistor (EGFET) pH application. TiO2/ZnO thin films were deposited using sol-gel spin coating method indium tin (ITO) substrates. After the deposition, annealed at constant temperatures 400 °C 15, 30, 40 60 minutes. The sensitivity of TiO2 film towards buffer solution was measured by dipping in pH4, pH7 pH10 solution. By varying annealing time, we found that 400°C 15 minutes gave highest compared to other conditions, with value 64.87 mV/pH.
harvard.edu
sci-hub.se 参考文章(12)
Zhengjie Zhang, Yusuf Valentino Kaneti, Xuchuan Jiang, Aibing Yu, Hydrothermal synthesis of sodium vanadium oxide nanorods for gas sensing application Sensors and Actuators B-chemical. ,vol. 202, pp. 803- 809 ,(2014) , 10.1016/J.SNB.2014.05.064
Thuy Kieu Truong, T.N.T. Nguyen, Tran Quang Trung, Il Yung Sohn, Duck-Jin Kim, Jin-Heak Jung, N.-E. Lee, Reduced graphene oxide field-effect transistor with indium tin oxide extended gate for proton sensing Current Applied Physics. ,vol. 14, pp. 738- 743 ,(2014) , 10.1016/J.CAP.2014.03.007
Elidia Maria Guerra, Marcelo Mulato, Titanium Oxide Nanorods pH Sensors: Comparison between Voltammetry and Extended Gate Field Effect Transistor Measurements Materials Sciences and Applications. ,vol. 5, pp. 459- 466 ,(2014) , 10.4236/MSA.2014.57049
M. A. Rosdan, S. H. Herman, W. F. H. Abdullah, N. S. Kamarozaman, M. I. Syono, Sputtered titanium dioxide thin film for Extended-Gate FET sensor application ieee regional symposium on micro and nanoelectronics. pp. 219- 222 ,(2013) , 10.1109/RSM.2013.6706513
A. B. Rosli, N. D. H. Abd Patah, M. A. Rosdan, M. M. Marbie, M. H. Juhari, S. S. Shariffudin, S. H. Herman, M. Rusop, Influence of metal catalyst for zinc oxide nanostructures grown by TCVD method for extended-gate FET sensor application ieee regional symposium on micro and nanoelectronics. pp. 171- 174 ,(2013) , 10.1109/RSM.2013.6706500
Dan Wang, Xiangfeng Chu, Menglian Gong, Gas-sensing properties of sensors based on single-crystalline SnO2 nanorods prepared by a simple molten-salt method Sensors and Actuators B-chemical. ,vol. 117, pp. 183- 187 ,(2006) , 10.1016/J.SNB.2005.11.022
Libu Manjakkal, Elvira Djurdjic, Katarina Cvejin, Jan Kulawik, Krzysztof Zaraska, Dorota Szwagierczak, Electrochemical Impedance Spectroscopic Analysis of RuO2 Based Thick Film pH Sensors Electrochimica Acta. ,vol. 168, pp. 246- 255 ,(2015) , 10.1016/J.ELECTACTA.2015.04.048
N. S Kamarozaman, Z. Aznilinda, S. H Herman, R. A Bakar, M. Rusop, Effect of annealing duration on the memristive behavior of Pt/TiO 2 /ITO memristive device ieee international conference on semiconductor electronics. pp. 703- 706 ,(2012) , 10.1109/SMELEC.2012.6417240
Cheng-En Lue, I-Shun Wang, Chi-Hsien Huang, Yu-Ting Shiao, Hau-Cheng Wang, Chia-Ming Yang, Shu-Hao Hsu, Ching-Yu Chang, William Wang, Chao-Sung Lai, pH sensing reliability of flexible ITO/PET electrodes on EGFETs prepared by a roll-to-roll process Microelectronics Reliability. ,vol. 52, pp. 1651- 1654 ,(2012) , 10.1016/J.MICROREL.2011.10.026
J.-Y. Li, S.-P. Chang, S.-J. Chang, T.-Y. Tsai, Sensitivity of EGFET pH sensors with TiO2 nanowires ECS Solid State Letters. ,vol. 3, ,(2014) , 10.1149/2.0091410SSL