Enhancement of electron emission efficiency and stability of molybdenum field emitter array by diamond-like carbon coating
作者： JH Jung , BK Ju , YH Lee , MH Oh , J Jang
关键词: Diamond-like carbon 、 Anode 、 Materials science 、 Field emitter array 、 Molybdenum 、 Plasma-enhanced chemical vapor deposition 、 Analytical chemistry 、 Coating 、 Field electron emission 、 Common emitter
摘要: We have studied the enhancement of electron emission by diamond-like carbon (DLC) coating on Mo field emitter arrays a layer-by-layer technique using plasma enhanced chemical vapor deposition. The turn-on voltage was lowered from 55 V to 30 20 nm DLC and maximum current increased 166 /spl mu/A 831 mu/A. Also gate required get anode 0.1 (/spl mu/A/emitter) decreases 77 48 V. Furthermore, coated FEAs is more stable than that non-coated FEAs.
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