Method and apparatus for inspecting pattern defects
作者： Kaoru Sakai , Takafumi Okabe , Shunji Maeda
DOI:
关键词: Coherence (physics) 、 Optics 、 Detector 、 Computer vision 、 Image processor 、 Image signal 、 Laser beams 、 Laser light 、 Materials science 、 Artificial intelligence 、 Image sensor
摘要: A method and apparatus for inspecting pattern defects emitting a laser beam, adjusting light-amount of the converting adjusted beam into slit-like light flux, lowering coherency irradiating sample with coherence reduced flux. An image reflection from is obtained, detector provided which includes sensor receiving it detected signal. processor detecting on patterns formed in accordance
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