Appearance inspection apparatus and method
作者： Takeshi Saruwatari , Yuichiro Hikida
DOI:
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摘要: An appearance inspection apparatus comprises an part for detecting a defect of pattern on the basis image surface substrate which is formed, captured by imaging part. The transfer transferring data obtained region to be inspected and stored in storing memory plurality processing memories GPUs taking corresponding respective regions processed out transferred are performing process detection data. further control acquiring tasks each prescribing details from task holding controlling accordance with tasks, respectively, independently
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