Semiconductor Processing Boat Design with Pressure Sensor
作者： Wei-Hung Lin , Ming-Da Cheng , Hsiu-Jen Lin , Ai-Tee Ang , Chung-Shi Liu
DOI:
关键词: Electrical engineering 、 Engineering 、 Acoustics 、 Retainer 、 Pressure sensor 、 Base (geometry)
摘要: Presented herein is a device comprising processing boat base at least one unit retainer disposed in the base. The further comprises cover having recess configured to accept and retain unit, aligned over, hold portion of retainer. retained by At pressure sensor sensel sense clamping force applied unit.
lens.org 参考文章(14)
Bryan K. Pawlak, Brett W. Johnson, Kenneth E. Pawlak, Sample tube racks having retention bars ,(2011)
Keith E. Fogel, Paul A. Lauro, Devendra K. Sadana, Stephen W. Bedell, Substrate holder assembly for controlled layer transfer ,(2013)
Yu-Lung Jeng, Allen Chiu, Polishing pad and polishing device ,(2009)
Francis Vo, Paul Henderson, Chimerized Wafer Boat for Use in Semiconductor Chip Processing and Related Methods ,(2010)
Haruo Ohya, Masahiro Watanabe, Takemasa Iwasaki, Sadao Shimoyashiro, Tsutomu Takahashi, Hiroshi Kikuchi, Production system with order of processing determination ,(1991)
Wayne O. Duescher, Raised island abrasive, lapping apparatus and method of use ,(2004)
Marko Eromaki, Mikko Ollila, Camera module having movable lens ,(2008)
Koji Taya, Junji Tanaka, Yasuhiro Shinma, Kouichi Meguro, Junichi Kasai, Masanori Onodera, Carrier structure for stacked-type semiconductor device, method of producing the same, and method of fabricating stacked-type semiconductor device ,(2005)
Carl Johan Galewski, Distributed Pressure Sensoring System ,(2006)
Choul-Su Kim, Masaharu Sukue, Byung-Woo Woo, Woo-Sik Kim, Sang-Beom Sim, Method of mounting an integrated circuit on a printed circuit board ,(1997)