Production system with order of processing determination
作者： Haruo Ohya , Masahiro Watanabe , Takemasa Iwasaki , Sadao Shimoyashiro , Tsutomu Takahashi
DOI:
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摘要: The present invention provides a carrier jig for use in processing, transporting and stocking wafer-like material used manufacture processes of semiconductor products, production system using the jig. comprises holder holding storing therein one wafer, example, container box loading holder. A mechanism transferring wafers by is provided each process, with result period time can be shortened speed enhanced.
google.gr 参考文章(34)
George E. Lund, System for sequencing articles including mail ,(1979)
William R. Mello, Jon C. Goldman, Hazen L. Hoyt, John D. Sanders, Semiconductor wafer carrier transport apparatus ,(1986)
Roger A. Powell, Method for resource allocation for the manufacture of a product ,(1986)
Paul L. Whelan, Material handling system and method for manufacturing line ,(1981)
Paul F. Key, I. Beaver Ii Robert, George L. Prodanovich, Michael J. Adams, Don O. Rawlings, Susan L. Hunt, P. Santhanam, Buffer storage apparatus for semiconductor wafer processing ,(1977)
Fuminori Hayano, Jiro Kobayashi, Yukio Kakizaki, Kazunori Imamura, Conveyor arm apparatus with gap detection ,(1987)
Kazuo Kera, Kenji Tsuchitani, Tomohiro Murata, Kuniaki Matsumoto, Masahiro Nakamura, Norihisa Komoda, Process monitoring apparatus for process management in production and assembly lines ,(1986)
Converse Vernon G, Allington George R, Mosber Peter J, Seymour Lee J, Industrial system and method ,(1970)
Norio Nikaido, Takeo Tanita, Yusaku Azuma, Toshihiro Yamamoto, Mitsuo Arai, Masateru Yasuhara, Shozo Kasai, Ryohei Inaba, Automatic article feeding system ,(1989)