Semiconductor wafer carrier transport apparatus

摘要: Semiconductor wafers in plastic cassettes are loaded into (and later unloaded from) an input/output station serving a CVD furnace and thereafter the non-manually transported by programmable elevator to from flat-finder, wafer transfer machine (where transferred boat) in-process storage. The boats second machine, boat storage loader (or process chamber directly). can be or while one both of elevators operating. Up eight human assisted steps reduced only two such steps. Furnaces having more than processing have loading station, dedicated each so that there is no cross contamination between chambers caused which delivered same returned cassettes.