Wafer boat support and method for twin tower wafer boat loader

摘要: An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats ( 24 ) onto/from cantilever paddle includes 47 - 1 carriage 42 supporting the First second vertical translation mechanisms 34 A,B) each include stationary part 62,63 vertically moveable support 61 ). horizontal 50 have base 86 supported by one supports horizontally arm 51 A boat assembly 102 loaded has an end first A) another B). rail 97 its ends arms, 96 is outer rotary arms to bring into lower position engage edge upper above wafers in clear as are withdrawn from