Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace

摘要: A method of carrying a boat, on which number wafers are mounted, into and from furnace using soft-landing loader having fork. In this method, before loading the boat furnace, reaction applied fork at specific point is measure while supporting thus measured stored in memory. The inserted into, then pulled out furance, leaving it within furnace. heat-treated then, again, raises wafer time measured, compared with value When not equal to memory, lowered moved slightly back or forth, raised again support repeating motion until becomes After both reactions have been found equal, thereby unloading therefrom.