Preparation method of reaction sintered silicon carbide cantilever paddle
作者： Wang Mingfeng , Jiang Gang , Shi Wei
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lens.org 参考文章(4)
Allen D. Edwards, Arthur W. Harrison, John M. Martin, Wafer boat support and method for twin tower wafer boat loader ,(2001)
Richard F. Buckley, Silicon carbide cantilever paddle ,(2001)
Yeshwanth Narendar, Richard F. Buckley, Method for treating semiconductor processing components and components formed thereby ,(2004)
Mingfeng Wang, Xulin Wang, Gang Jiang, Wei Shi, Huashan Li, Method for manufacturing silicon carbide cantilever paddle through reaction sintering ,(2011)