STORAGE SYSTEM AND PURGE METHOD IN STORAGE SYSTEM
作者： Yamaji Takashi , Tsubaki Tatsuo
DOI:
关键词: Volume (thermodynamics) 、 Computer data storage 、 Waste management 、 Controller (computing) 、 Container (type theory) 、 Nozzle 、 Purge 、 Environmental science
摘要: A storage system according to the present invention is provided with: a plurality of shelves each with nozzle for supplying clean gas; flow-volume control parts controlling supply volume transport device delivering/receiving containers to/from shelves; and controller parts. By means controller, before occurrence container scheduled be stored, at least one shelf preliminarily reserved in preparation storing container, gas supplied from part on basis result this reservation.
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Tsubaki Tatsuo, Murata Masanao, Purge device, purge stocker, and cleaning method ,(2018)
Takubi Atsushi, Ito Yoshihiro, HOUSING/CONVEYING DEVICE FOR SEMICONDUCTOR WAFER ,(1995)
Yuichi Ueda, Takashi Fujita, Kazushi Tsujimoto, Article storage facility ,(2008)