Purge device, purge stocker, and cleaning method
作者： Tsubaki Tatsuo , Murata Masanao
DOI:
关键词:
摘要: In order to provide a purge device capable of removing particles adhered gas introducing port container or around nozzle, (4) is provided with nozzle (31) blowing (G1), and control unit (34) for the from in state wherein bottom surface (Fb) (F) be purged, are facing each other.
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