作者: O Kraft , R Schwaiger , P Wellner
DOI: 10.1016/S0921-5093(01)00990-X
关键词: Thin film 、 Tensile testing 、 Deposition (law) 、 Cantilever 、 Nanoindentation 、 Composite number 、 Forensic engineering 、 Substrate (electronics) 、 Materials science 、 Composite material 、 Polyimide
摘要: … mechanisms in constrained volumes and to determine fatigue lifetimes under … the fatigue behavior of thin metal films on substrates: The first technique involves tensile testing of Cu films …