Disentangling fluxes of energy and matter in plasma-surface interactions: Effect of process parameters
作者： M. Wolter , I. Levchenko , H. Kersten , S. Kumar , K. Ostrikov
DOI: 10.1063/1.3475728
关键词: Electron temperature 、 Atmospheric-pressure plasma 、 Atomic physics 、 Energy flux 、 Argon 、 Methane 、 Chemistry 、 Plasma 、 Gas composition 、 Hydrogen
摘要: The possibility to discriminate between the relative importance of fluxes energy and matter in plasma-surface interaction is demonstrated by flux measurements low-temperature plasmas ignited radio frequency discharge (power pressure ranges 50–250 W 8–11.5 Pa) Ar, Ar+H2, Ar+H2+CH4 gas mixtures typically used nanoscale synthesis processing silicon- carbon-based nanostructures. It shown that varying composition pressure, power, surface bias one can effectively control temperature supply rates. experimental findings are explained terms plasma-specific reactions plasma bulk on surface.
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