Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors
作者： D Briand , A Krauss , B van der Schoot , U Weimar , N Barsan
DOI: 10.1016/S0925-4005(00)00433-0
关键词: Drop (liquid) 、 Analytical chemistry 、 Fabrication 、 Drop coating 、 Materials science 、 Composite material
摘要: … In the aim of reducing the gas sensor power consumption, … The micro-hotplates were made up of a heater stacked between … Holes having vertical walls can be etched by DRIE of silicon. …
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sci-hub.se 参考文章(18)
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