An approach for determining chemical composition of zinc oxide films with carbon-containing contamination at the surface

摘要: Reliable determination of the elemental composition ZnO-based films is complicated by fact that as a result interaction with environment, surface quickly covered large number carbon-containing CO x contaminations. In this paper, we propose two methods for analyzing results measurements composition, allowing to determine film and contamination. These are based on deposition analysis several (at least two) grown under same conditions, which differ only in thickness. Both were applied processing obtained EDS ten pairs Ga-doped ZnO (GZO) ultrasonic spray pyrolysis silicon substrate. each pair, one GZO was thinner than other thicker one. The differed from another Ga/Zn ratio film-forming solution, used synthesis GZO, varied range 0–15 at.%. contamination at found be CO0.925. Concentration oxygen 41.7 ± 1 at.%, O/(Ga + Zn) around 0.72 ± 0.03. Crystalline solar cells GZO/(p+nn+)c-Si structure spray-deposited an antireflection coating transparent electrode showed efficiency 15.7 % sun conditions.