Improvement in wear resistance of C+ ion implanted DC magnetron sputtered TiC film
作者： Revati Rani , N. Kumar , D. Dinesh Kumar , Kalpatru Panda , S.K. Srivastava
DOI: 10.1016/J.TRIBOINT.2016.08.033
关键词: Materials science 、 Ion implantation 、 Phase (matter) 、 Ion beam 、 Metallurgy 、 Ion 、 Composite material 、 Cavity magnetron 、 Tribology 、 Surface roughness 、 Microstructure
摘要: Abstract DC Magnetron sputtered TiC films were subjected to C + ion implantation in order modify the microstructure and topography. The surface roughness of implanted increased due beam induced bubbling blistering. Hardness Young's modulus values decreased amorphization crystalline phase. adhesive strength film-substrate interface was not influenced by implantation. tribological results showed considerable enhancement wear resistance highest dose film, compared as-deposited film. enhanced properties are correlated
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