Substrate floating apparatus and method of manufacturing liquid crystal display apparatus using the same
作者： Han-Beom Jo , Yong-Seok Park , Sang-Ho Kim
DOI:
关键词: Substrate (printing) 、 Optoelectronics 、 Liquid-crystal display 、 Computer hardware 、 Engineering
摘要: There are provided a substrate floating apparatus for preventing interference between glass and board when conveying the method of manufacturing LCD devices using apparatus. The includes body into which fluid is supplied stores fluid, that placed on top through sprayed to float predetermined height, fixing member mechanically fixes body. A certain process performed while substrate.
lens.org 参考文章(17)
Nobuhito Yokoyama, Kenji Tanimoto, Yuji Tsutsui, Masaru Yoshida, Makoto Morita, Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus ,(1999)
Karl-Heinz Johannsmeier, Prealignment system for an optical alignment and exposure instrument ,(1973)
Masaki Kusuhara, Michio Yagai, Masayuki Toda, Masaru Umeda, Substrate body transfer apparatus ,(1999)
Sala Jaime Marti, Pneumatic conveyor for light-weight empty bottles ,(1999)
Raj B. Apte, Robert A. Sprague, Lars-Erik Swartz, Andrew A. Berlin, David K. Biegelsen, Warren B. Jackson, Flexible object handling system using feedback controlled air jets ,(1996)
Hirohiko Ubukata, Wafer probe apparatus with pneumatic wafer orienting mechanism ,(1978)
Lynn R. Skow, Arthur R. Moore, William M. Dunbar, Flexible system for handling articles ,(1993)
Brian K. Hilbish, Arnold C. Burgess, Michael A. Wilson, Pressurized air conveyor ,(1993)
Ronald A. Lenhart, Air table system ,(1980)
John M. White, Michael W. Richter, Wendell T. Blonigan, Multi-function chamber for a substrate processing system ,(1999)