Wafer probe apparatus with pneumatic wafer orienting mechanism

摘要: For properly orienting, or setting in a predetermined angular position, semiconductor wafer on table which integrated circuits the like produced within and upon are tested with probes, is buoyed up from by gas under pressure applied thereto openings formed further revolved substantially about its own axis, also application of nozzle disposed above table. A plurality LED-phototransistor combinations sense orientation position an recess wafer, causing closure solenoid valves to terminate when oriented In another embodiment, emitted only