Automatic wafer feeding and pre-alignment apparatus and method

摘要: Improved apparatus and method for automatically withdrawing silicon wafers or like articles from a supply magazine, transporting the same on fluid bearing to station where such are pre-aligned in sequence prior treatment thereof at an adjacent mask aligner mechanism, discharging following onto another transportation into discharge magazine. sensor means is provided conjunction with magazine indexing magazines feed receive moving relative thereto. During pre-alignment operation, each wafer rotated air until it oriented flat edge surface predetermined position, which position maintained as transferred fine orientation completed, either manually automatically, accordance type of this invention combined.