Model validation of a mercury sensor, based on the resistivity variation of a thin gold film

摘要: Abstract Nowadays, the awareness of importance mercury as a global pollutant increases need for new tools helping support citizens’ health safeguard. With this in mind, authors developed microfabricated sensor to monitor elemental gaseous (Hg0) air, and they presented it previous work. A deep understanding physical phenomena concerning processes involved was necessary improve performance develop an “optimised sensor”. This paper presents simple model, quantitatively estimate sensitivity sensor. The is based on resistivity variation induced by adsorption onto thin gold film. model provided design criteria version describes validation, which carried out through series experiments sensors, well design, microfabrication process, technical features consists miniaturized system, includes sensing element, electrical routes, digital temperature integrated small SIM-card-shape substrate. Conventional IC technologies materials were used throughout fabrication order produce low-cost microsystem, could be disposable