Producing a porous dielectric film useful in microelectronics by crosslinking and heating a film comprising a pore former in a matrix of dielectric material comprises treating the film with an acid or base
作者： Zenasni Aziz , Trouve Helene , Leduc Patrick , Jousseaume Vincent
DOI:
关键词: Base (chemistry) 、 Composite film 、 Coating 、 Chemical engineering 、 Porosity 、 Matrix (chemical analysis) 、 Substrate (printing) 、 Dielectric 、 Materials science 、 Microelectronics
摘要: Producing a porous dielectric film with constant of 3 or less by coating substrate composite comprising thermally decomposable pore former dispersed in matrix material, crosslinking the and heating product to decompose remove comprises treating an acid base before after step.
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