Process chamber sleeve with ring seals for isolating individual process modules in a common cluster

摘要: A modular semiconductor wafer processing system comprises a plurality of detachable process reactors and other types generators that can be attached to any several ports on the lid circular handling chamber. multiple-spoke single-axis rigid-arm transfer carousel centrally located within chamber has access respective areas beneath each port in lid. set independent cylindrical sleeves with sealing rings are provided rise up from floor contact seal against isolate stations. The is automatically positioned out way before raised sealed.